Ville Rontu, Ville P. Jokinen, S. Joonas J. Petteri Halli, Joonas J.

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Ville Rontu, Ville P. Jokinen, S. Joonas J. Petteri Halli, Joonas J. Heikkinen, Heini Elomaa, Benjamin P. Accepted for publication in CommsBio Ras, Jyrki Vuola, Sami Franssila, Esko Kankuri: A microfluidic oxygen sink to create a targeted cellular hypoxic microenvironment under ambient atmospheric conditions, accepted in Acta Biomaterialia, Rontu, P.

Sippola, M. Broas, G. Ross, T. Sajavaara, R. Puurunen, H. Lipsanen, M. B, Volume: 5, pp. Zhivonitko, Igor V. Koptyug, Sami Franssila: Atomic layer deposited platinum nanoparticles on oxide support for catalytic microreactors, Chemistry: A European Journal,Volume: 23, pp. Lipponen, S. Sikanen, V. Jokinen, A. Tatikonda, S.

Franssila, R. Kostiainen and T. Kotiaho: Thiol-ene micropillar electrospray ionization platform for zeptomole level bioanalysis, Analyst, , , pp. A 34, ; doi: Huttunen, Sari E. Hoshian, V. Jokinen, K. Hjort, R. Ras, S. Power Sources, Maria Berdova, Oili M. Ylivaara, Ville Rontu, Pekka T. Puurunen, Sami Franssila: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes, J.

Lyytinen, M. Berdova, P. Hirvonen, X. Liu , S. Franssila, Q. Zhou and J. Ville-Veikko Telkki, Vladimir V. Weckman, Iyya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. A 32, 01A ; doi: MEMS Vol. Wirtssohn, M. Haapala, L.

Sainiemi, S. Franssila: Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry, J. Aspects — A 31, ; doi: Vladimir V. MEMS , p. Lauri and Henri J.


Introduction to Microfabrication

It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques completely new and modified figures more coverage of imprinting techniques, process integration and economics of microfabrication homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.


Introduction to Microfabrication, 2nd Edition

Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: A comprehensive presentation of basic fabrication processes An emphasis on materials and microstructures, rather than device physics In-depth discussion on process integration showing how processes, materials and devices interact A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.

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